高純有機(jī)試劑國內(nèi)外標(biāo)準(zhǔn)比較分析
打開文本圖片集
Comparative Analysis of Domestic and International Standards for High Purity Organic Reagents
SHI Zeyuan ZHANG Junhua CAO Kewei WUYiran ZHAO Junsha
(China Electronics Standardization Institute)
Abstract:Highpurityorganicreagents,belongingtothecategoryofhighpurityreagentsinelectronicchemicals,areone of theraw materials forcompounding functional electronicchemicals,which are widelyused invarious processes in the semiconductorindustrysuchas integratedcircuitsanddisplay.Withthecontinuous terationofthe integrated circuit process, therequirements forhighpurityorganicreagents havebeen gradualyincreased.Atpresent,sincetherearecircumstancesof mismatchingand inapplicabilitybetweenstandardsandtheindustry,itisdificultogive playtothesupporting andleading roleoftandards.Thispaperstartswiththedevelopmentstatusanddemandofelectronicchemicalsindustrysystem,sortsout andanalyzesthestandards status,and puts forwardthe ideasandsuggestionsonthesystematic developmentofhigh purity organic reagent standards.
Keywords:electronic chemicals;high purityorganic reagents; standards; standards system
0 引言
電子化學(xué)品（ElectronicChemicals）國際上統(tǒng)稱為工藝化學(xué)品（ProcessChemicals），又稱濕化學(xué)品（WetChemicals），其主體成分或原材料純度大于 99.99% ，雜質(zhì)離子和微粒數(shù)符合嚴(yán)格要求的化學(xué)試劑，主要用于集成電路、顯示面板、光伏組件等電子元器件和模組生產(chǎn)中的清洗、光刻、刻蝕、顯影、互聯(lián)等工藝，其純度和潔凈度對電子元器件和模組的成品率、電學(xué)性能及可靠性都有十分重要的影響。（剩余5899字）