集成電路廢硫酸制備鈦白粉和聚合硫酸鐵的環(huán)境－經(jīng)濟表現(xiàn)評估

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中圖分類號：X70 文獻標志碼：A 文章編號：1671-8755（2025）02-0046-08

Abstract： The environmental impacts and economic performances of using waste sulfuric acid to prepare titanium dioxide （S1）and polyferric ferric sulfate（S2）were compared by adopting the life cycle assessment and techno-economic analysis method，aiming to provide decision-making support for the selection of high-value and green utilization paths of waste sulfuric acid. The results indicate that under deterministic parameter scenarios，the environmental performance of S2 is superior to that of S1 in 1O environmental impact categories（including global warming potential），while its net profit is 21.62% inferior to that of S1.In light of the inherent uncertainty associated with energy and material inputs in industrialization practices，the short-process S2 system demonstrates significantly lower mean variation rates across all environmental impact categories and economic performance metrics compared to the more complex S1 process. This indicates that direct conversion of waste sulfuric acid to polymeric ferric sulfate ofers more robust environmental -economic performance. Compared to the current “point-to-point” resource recovery approach for titanium dioxide production，the direct preparation of polymeric ferric sulfate offrs a superior option for high-value green utilization of waste sulfuric acid in the integrated circuit industry.

Keywords： Integrated circuit；Waste sulfuric acid utilization；Life cycleassessment；Techno-economic analysis

集成電路產(chǎn)業(yè)作為現(xiàn)代電子工業(yè)的核心，是支撐經(jīng)濟社會發(fā)展和保障國家安全的基礎(chǔ)性、先導(dǎo)性產(chǎn)業(yè)[1]。（剩余9023字）