FMCS系統(tǒng)在FAB廠房中的應(yīng)用
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[摘 要]結(jié)合芯片制造的主要工藝流程和FAB廠房的特點(diǎn)，主要介紹了廠務(wù)監(jiān)控系統(tǒng)FMCS系統(tǒng)的結(jié)構(gòu)及優(yōu)點(diǎn)，并就FMCS系統(tǒng)在FAB廠房的應(yīng)用給出工程實(shí)例，為進(jìn)行FAB廠房自動(dòng)化控制規(guī)劃提供了新方案。
[關(guān)鍵詞]FAB;FMCS;自動(dòng)化
[中圖分類號(hào)]TN05 [文獻(xiàn)標(biāo)志碼]A [文章編號(hào)]2095–6487（2022）07–000–04
Application of FMCS System in FAB Plant
Shi Gui-chun
[Abstract]Combined with the main process flow of chip manufacturing and the characteristics of Fab plant， this paper mainly introduces the structure and advantages of FMCS system， and gives an engineering example of the application of FMCS system in fab plant， which provides a new scheme for engineers and technicians in the automatic control planning of Fab plant.
[Keywords]FAB; FMCS; automation
FAB廠房通常又稱晶圓廠房，而芯片制造是在FAB廠房中利用硅晶圓作為低襯，并在硅晶圓上進(jìn)行電路設(shè)計(jì)制造，最終成為芯片的一個(gè)過程。（剩余4606字）