光纖準直非球面微透鏡陣列模壓成形

打開文本圖片集

Precision glass molding for fiber collimating aspherical microlens array

GAO Lihengl，YU Qian 1* ，ZHOU Tianfeng1，ZHOU Jia 3 ，SUN Xiuwen1， YANTao2，RUANBenshuai4

（1. School ofMechanical Engineering，Beijing Institute of Technology， Beijing 1Ooo8l， China; 2. Jiangxi Phenix Optical Technology Co.，Ltd.，Shangrao 334OOO，China; 3. Suzhou Institute ofNano-Tech and Nano-Bionics， Chinese Academy of Sciences， Suzhou 215123，China; 4.Cheerful Micro-Nano Technology （Ningbo） Co. Ltd.，Ningbo 3155OO， China） * Corresponding author，E-mail： yu_qian@bit. edu. cn

Abstract： This study explores the application of precision glass molding （PGM） technology to enhance the machining accuracy and effciency of aspherical microlens arrays （AMLA） for fiber array collimation. The research focuses on the control of mold machining accuracy and the implementation of a compensation approach to address form errors in AMLA fabrication. A localized spiral diamond milling method is ntroduced for machining nickel-phosphorus mold materials，tailored to the structural characteristics and stringent precision requirements of AMLA. Furthermore，a form error compensation method is developed， considering the high-temperature properties of mold and glass materials as well as process parameters affecting accuracy.By optimizing the mold profile through compensation design，the precision of PGM is significantly improved，achieving the high-accuracy fabrication of a 10×10 AMLA. The proposed process controls the form error peak-to-valley（PV）within 220-380nm andachievesa surface roughness ?[Ra） of 7-10nm ，thereby enhancing optical performance. This work provides a viable and eficient technical framework for the high-precision， large-scale production of AMLA.

Key Words： ultraprecision machining；spiral diamond milling； aspherical microlens array； precision glassmolding；form error

1引言

光纖準直透鏡是一種將光纖中傳輸的光束進行有效準直的光學元件，通常用于光通信裝置、激光系統和光學傳感器中，以確保光線能夠以最佳的發(fā)散角度射出，實現耦合效率和傳輸距離最大化，減少信號損失，提高系統性能。（剩余9906字）