基于單模光纖分束器的夏克-哈特曼波前傳感器校準(zhǔn)的方法
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中圖分類號(hào)：TH741文獻(xiàn)標(biāo)志碼：A
Abstract： A calibration method of Shack-Hartmann wavefront sensor based on single-mode fiber beam splitter is proposed in this paper. The parallel beam and sensor were precisely aligned through single-mode fiber coupling to make the standard centroids of spot array closer to the physical position of the optical axis of the micro-lenses. The calibration setup and calibrating procedure were introduced. And 11 spherical waves with different radius of curvatures were used to verify the calibration accuracy. The experiment results and errors were compared. The results showed that compared with the conventional calibrating method by using plane wave， the average deviation of reconstructed wavefront peak to valley value with proposed method was reduced from 1.024 to0.667λ ，and the root mean square value was reduced from 0.136λ to 0.033，which demonstrated that the proposed method significantly improves the reconstruction accuracy.
Keywords： Shack-Hartmann wavefront sensor; wavefront calibration; wavefront aberration
引言
夏克-哈特曼波前傳感器（Shack-Hartmannwavefrontsensor，本文簡稱為SH波前傳感器）主要由微透鏡陣列（microlensarray，MLA）與電荷耦合器件（charge-coupleddevice，CCD）組成，是一種廣泛應(yīng)用于自適應(yīng)光學(xué)、光學(xué)加工、裝調(diào)檢測和人眼波前像差檢測等領(lǐng)域的光電器件。（剩余6377字）